Title pretty much covers it. I think the predecessor to Cybernator is the earliest I know (1990) but I wouldn't be surprised if there are earlier examples. I suspect the inspiration may have come from Thexder, which is a similar idea but not quite the same.
Update: The original Mario Land qualifies and is actually older - 1989. From the Wikipedia page:
Two of the game's twelve levels are "forced-scrolling" Gradius-style shooters where Mario helms a submarine or airplane and fires projectiles towards oncoming enemies, destructible blocks and bosses.
Hopefully that clarifies what I'm talking about.